| Titanium (Ti) Series Sputtering Target/Cathode | |||
| Item | Material | Purities | Application |
| Ti | Titanium | 3N, 4N, 4N5, 5N | Electronics, semiconductor |
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Ti |
Titanium |
2N7, 3N5, 4N5 | Display |
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Ti |
Titanium |
2N4 | Glass |
|
Ti |
Titanium |
* | Magnetic |
|
Ti |
Titanium |
3N5, 3N | Display |
|
Ti |
* | Others | |
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| ASTM B265-2015 | Standard Specification for Titanium and Titanium Alloy Strip, Sheet, and Plate |
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ASTM B348-2013 |
Standard Specification for Titanium and Titanium Alloy Bars and Billets |
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ASTM B367-2013(2017) |
Standard Specification for Titanium and Titanium Alloy Castings |
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ASTM B600-2011(2017) |
Standard Guide for Descaling and Cleaning Titanium and Titanium Alloy Surfaces |
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ASTM B977-2013 |
Standard Specification for Titanium and Titanium Ingots |
|
ASTM F1709-1997(2016) |
Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications |
|
YS/T 891-2013 |
Methods for chemical analysis of high purity titanium.Determination of trace impurity element content. Glow discharge mass spectrometry |
|
YS/T 892-2013 |
Methods for chemical analysis of high purity titanium.Determination of trace impurity element content.Inductively coupled plasma mass spectrometry |
|
YS/T 893-2013 |
High-purity sputtering titanium target used in electronic film |
|
GB/T 3620.1-2016 |
Designation and composition of titanium and titanium alloys |
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GB/T 3620.2-2007 |
Titanium and titanium alloys permissible variations of chemical composition for wrought product analysis |
|
GB/T 3621-2007 |
Titanium and titanium alloy plate and sheet |
|
DS/ISO 2768-1-1993 |
Tolerances for linear and angular dimensions without individual tolerance indications |
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DS/ISO 2768-2-1993 |
Geometrical tolerances for features without individual tolerance indications |
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| Titanium Sputtering target | Forming (Smelting, Powder metallurgy) |
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| Inspection | Machining |
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| Analysis | Microstructure |
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| Surface Quality | Surface Quality |
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| Sputtering target and Cathode |
Sputtering target and Cathode |
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Sputtering target and Cathode |
Sputtering target and Cathode |
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Sputtering target
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